采用射频磁控溅射方法在NiO-YSZ阳极基底上制备了致密的YSZ电解质薄膜,主要研究了热处理温度对电解质薄膜性能的影响.试验发现随着热处理温度的提高,所制备的YSZ薄膜中晶粒结合更加致密,气孔率显著降低,薄膜与基底间的结合更加紧密.通过组装单体电池实际考察了薄膜的性能,发现随着热处理温度的提高,电池的开路电压及放电性能均有大幅度的提高.在800℃下,开路电压由0.82V提高到1.023V,已接近SOFC的理论电压;最大功率密度由480mW/cm2提高到760 mW/cm2.
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