用溶胶-凝胶法制备(Pb_(0.5)Sr_(0.5))TiO_3(简称PST)前驱体溶液,以三水醋酸铅、醋酸锶、钛酸丁酯为原料,乙二醇甲醚、去离子水、乙酰丙酮做溶剂,通过旋涂工艺在Pt/Ti/SiO_2/Si(100)基片上沉积PST薄膜.薄膜经320～380℃热分解,再经650℃退火30min,得到晶化好的薄膜样品,X射线衍射结果表明PST薄膜为钙钛矿立方相结构,其晶格常数为a=0.3919nm.用原子力显微镜观测其表面形貌,薄膜平均晶粒尺寸为300nm.用XPS测量了650℃退火PST薄膜样品的表面化学态,结果表明表面富铅,接近表面区域的原子比率Pb∶Sr∶Ti∶O是0.52∶0.50∶1.0∶3.02,接近(Pb_(0.5)Sr_(0.5))TiO_3的理想配比.
Lead strontium titanate (Pb_(0.5)Sr_(0.5))TiO_3 (abbreviated as PST) thin films were deposited on Pt/Ti/SiO_2/Si(100) substrates by using a sol-gel method with spin-coating processing. The crystalline films were studied by means of X-ray diffraction (XRD) and atom force microscopy (AFM). The results show that the film was annealed at 650℃ for 30min with perovskite cubic phase, and the lattice parameter a=0.3919nm. The chemical states and chemical composition of the films were determined by X-ray photoelectron spectroscopy (XPS) near the surface. The results show that stoichiometry of (Pb_(0.5)Sr b_(0.5))TiO_3.
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