运用射频磁控溅射技术,改变氩氧流量比在玻璃衬底上生长ZnO∶ Al(ZAO)样品,采用XRD、紫外-可见分光光度计对薄膜微结构、厚度及其光学性能表征,结果发现:维持氩流量不变(9 sccm),随着氧流量增加(1~9 sccm),样品XRD峰强减小,半高宽增大,晶粒尺寸减小,薄膜结晶性能变差;而维持氧流量不变(9 sccm),氩流量减小(9~3 sccm),样品XRD峰强增大,半高宽减小,晶粒尺寸变大,结晶性能变好.紫外可见光光谱在400 ~ 900nm波长区间平均透射率差异大(67.9% ~91.1%);在420 ~ 900 nm波长区间平均透光率高且差异小(90.2% ~92.4%).
参考文献
[1] | H. Zhu;E. Bunte;J. Huepkes;S.M. Huang .Sputtering of ZnO:Al films from dual tube targets with tilted magnetrons[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2011(7):2366-2370. |
[2] | X. Diez-Betriu;R. Jimenez-Rioboo;J. Sanchez- Marcos .Amorphous-nanocrystalline Al doped ZnO transparent conducting thin films[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2012(Suppl.1):445-449. |
[3] | W.W. Zhong;F.M. Liu;L.G. Cai;C.C. Zhou;P. Ding;H. Zhang .Annealing effects of co-doping with Al and Sb on structure and optical-electricalproperties of the ZnO thin films[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2010(2):265-268. |
[4] | Gabas, M.;Barrett, N. T.;Ramos-Barrado, J. R.;Gota, S.;Rojas, T. C.;Lopez-Escalante, M. C. .Chemical and electronic interface structure of spray pyrolysis deposited undoped and Al-doped ZnO thin films on a commercial Cz-Si solar cell substrate[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2009(8):1356-1365. |
[5] | Lin, JC;Peng, KC;Tseng, CA;Lee, SL .Deposition of Al-doped and Al, Sc-co-doped zinc oxide films by RF- and DC-sputtering of the ZnO and Al-xSc (x=0, 0.4, 0.8 and 1.7 wt.%) targets[J].Surface & Coatings Technology,2008(22/23):5480-5483. |
[6] | Volintiru I;Creatore M;Kniknie BJ;Spee CIMA;van de Sanden MCM .Evolution of the electrical and structural properties during the growth of Al doped ZnO films by remote plasma-enhanced metalorganic chemical vapor deposition[J].Journal of Applied Physics,2007(4):43709-1-43709-9-0. |
[7] | Fay S;Feitknecht L;Schluchter R;Kroll U;Vallat-Sauvain E;Shah A .Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2006(18/19):2960-2967. |
[8] | Fay S;Steinhauser J;Oliveira N;Vallat-Sauvain E;Ballif C .Opto-electronic properties of rough LP-CVD ZnO : B for use as TCO in thin-film silicon solar cells[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2007(24):8558-8561. |
[9] | J. Muller;G. Schope;O. Kluth;B. Rech;M. Ruske;J. Trube;B. Szyszka;X. Jiang;G. Briauer .Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(2):327-333. |
[10] | Hong RJ.;Jiang X.;Szyszka B.;Sittinger V.;Pflug A. .Studies on ZnO : Al thin films deposited by in-line reactive mid-frequency magnetron sputtering[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2003(1/4):341-350. |
[11] | 朱华,刘辉文,况慧芸,冯晓炜.射频磁控溅射生长ZnO薄膜及性能研究[J].人工晶体学报,2012(01):130-135. |
[12] | 朱华,况慧芸,冯晓炜,万文琼.氮流量对ZnO∶N薄膜微结构及光学性能影响[J].人工晶体学报,2012(05):1280-1285. |
[13] | LU Feng,XU ChengHai,WEN LiShi.Analysis on the process of ZAO films by DC magnetron reactive sputtering[J].中国科学:技术科学(英文版),2011(01):28-32. |
[14] | LI Cui-ping,YANG Bao-he,CHEN Xi-ming,WU Xiao-guo.Effects of annealing on the characteristics of ZnO films deposited in various O2/(O2+Ar)ratios[J].光电子快报(英文版),2010(04):284-287. |
[15] | TANG Ning,WANG JinLiang,XU HengXing,PENG HongYong,FAN Chao.Optical characterization of ZnO thin films deposited by RF magnetron sputtering method[J].中国科学E辑(英文版),2009(08):2200-2203. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%