{"currentpage":1,"firstResult":0,"maxresult":10,"pagecode":5,"pageindex":{"endPagecode":5,"startPagecode":1},"records":[{"abstractinfo":"A series of experiments were carried out to study the influence of low temperature <span style=\"color:red\">plasma</span> nitriding on the mechanical properties of AISI 420 martensitic stainless steel. <span style=\"color:red\">Plasma</span> nitriding experiments were carried out for 15 hours at 350℃ by means of DC-pulsed <span style=\"color:red\">plasma</span> with 25%N2+75%H2 gas. The microstructure, phase composition and residual stresses profiles of the nitriding layers were determined by optical microscopy and X-ray diffraction. The microhardness profiles of the nitriding surfaces were also studied. The fatigue life, sliding wear and erosion wear loss of the untreated specimens and <span style=\"color:red\">plasma</span> nitriding specimens were determined on the basis of a rotating bending fatigue tester, a ball-disk wear tester and a solid particle erosion tester. The results show that the 350℃ nitriding surface is dominated by  -Fe3N and  , which is supersaturated nitrogen solid solution. They have high hardness and chemical stabilities. So the low temperature <span style=\"color:red\">plasma</span> nitriding not only increases the surface hardness values but also improves the wear and erosion resistance. In addition, The fatigue limit of AISI 420 steel can also be improved by <span style=\"color:red\">plasma</span> nitriding at 350℃， because <span style=\"color:red\">plasma</span> nitriding produces residual compressive stress inside the modified layer.","authors":[{"authorName":"Y.T. Xi","id":"79678e5b-f7a3-4640-bc1c-99e4c32e7dd0","originalAuthorName":"Y.T. Xi"},{"authorName":" D.X. Liu","id":"6d2af616-f318-498e-8370-920575e827b3","originalAuthorName":" D.X. Liu"},{"authorName":" D. Han","id":"ed7060f8-8efe-478f-b85d-029d9c76eb8b","originalAuthorName":" D. Han"},{"authorName":" Z.F. Han","id":"3db03f96-6aed-4dfb-9948-a17b9278de6d","originalAuthorName":" Z.F. Han"},{"authorName":"null","id":"87e90af6-384e-47e1-bdb7-8e9bb084de62","originalAuthorName":"null"},{"authorName":"null","id":"95f36017-4a19-4e20-bc54-6840745728ed","originalAuthorName":"null"},{"authorName":"null","id":"d5ee5081-b7e5-4b2d-b1e6-ff9e092d80e5","originalAuthorName":"null"},{"authorName":"null","id":"49da0d5b-c83b-4857-8f1b-2e43d7388b7f","originalAuthorName":"null"}],"categoryName":"|","doi":"","fpage":"21","id":"f8ec3dc0-ff3f-4c0c-85b2-94d6d003b165","issue":"1","journal":{"abbrevTitle":"JSXBYWB","coverImgSrc":"journal/img/cover/amse.jpg","id":"49","issnPpub":"1006-7191","publisherId":"JSXBYWB","title":"金属学报(英文版)"},"keywords":[{"id":"5098d70c-c38b-4fae-a9bf-1fa7276c5a43","keyword":"Martensitic stainless steel","originalKeyword":"Martensitic stainless steel"},{"id":"897c0259-6fb2-4b31-98d0-1308488091b1","keyword":"stainless","originalKeyword":"stainless"},{"id":"b8df1af2-cfb0-431c-b135-bb46418581cc","keyword":"steel","originalKeyword":"steel"},{"id":"b6e518cd-5179-4372-a3e1-1f1d01c95515","keyword":"<span style=\"color:red\">Plasma</span>","originalKeyword":"Plasma"},{"id":"76366576-b6b6-4c85-9190-721003aee716","keyword":"nitri","originalKeyword":"nitri"}],"language":"en","publisherId":"1006-7191_2008_1_8","title":"Improvement of Mechanical Properties of Martensitic Stainless Steel by <span style=\"color:red\">Plasma</span> Nitriding at Low Temperature","volume":"21","year":"2008"},{"abstractinfo":"The process of Luda ilmenite smelting by <span style=\"color:red\">plasma</span> furnace has been studied by means of self-designed <span style=\"color:red\">plasma</span> torch. The prereduced Luda ilmenite was melted satisfactorily in <span style=\"color:red\">plasma</span> furnace to produce Ti enriched slag containing 90-98% TiO_2.","authors":[{"authorName":"LAN Yaozhong","id":"52e7ff67-3240-4ac3-900f-34f264140ba6","originalAuthorName":"LAN Yaozhong"},{"authorName":" Panzhihua Institute of Iron and Steel Research","id":"e823b63a-6348-488f-bd88-389d847cf092","originalAuthorName":" Panzhihua Institute of Iron and Steel Research"},{"authorName":" Sichuan","id":"3140a2df-022a-4241-b527-131284a06c6e","originalAuthorName":" Sichuan"},{"authorName":" ChinaZHU Zuze","id":"244f57d4-3043-4e64-98f3-abca3d455f65","originalAuthorName":" ChinaZHU Zuze"},{"authorName":"LIU Chunpeng","id":"391bc961-24f8-4d8e-8e88-53cf621369b6","originalAuthorName":"LIU Chunpeng"},{"authorName":" Kunming Institute of Technology","id":"4a8d3d5c-34fd-4be9-9bb6-d30e9e626672","originalAuthorName":" Kunming Institute of Technology"},{"authorName":" Kunming","id":"12a799fe-cff9-4c8c-b665-ba27d6f8b6b7","originalAuthorName":" Kunming"},{"authorName":" China LAN Yaozhong","id":"15f2d961-5e84-478e-800f-02ffa842fcba","originalAuthorName":" China LAN Yaozhong"},{"authorName":" Panzhihua Institute of Iron and Steel Research","id":"2e52dde7-4a7e-43d1-aa87-c4b76ba93674","originalAuthorName":" Panzhihua Institute of Iron and Steel Research"},{"authorName":" Dukou 617000","id":"69750535-7963-4311-8b6e-14c6fca954f9","originalAuthorName":" Dukou 617000"},{"authorName":" Sichuan","id":"ff93ad91-9d95-45a5-8aab-ebe8a8182761","originalAuthorName":" Sichuan"},{"authorName":" China","id":"8135f06d-2f64-4052-a283-52ea43b8281e","originalAuthorName":" China"}],"categoryName":"|","doi":"","fpage":"65","id":"594a280f-3472-4169-a9cb-1f4a8f1013fe","issue":"7","journal":{"abbrevTitle":"JSXBYWB","coverImgSrc":"journal/img/cover/amse.jpg","id":"49","issnPpub":"1006-7191","publisherId":"JSXBYWB","title":"金属学报(英文版)"},"keywords":[{"id":"9bd04945-c8b6-46b5-81a9-7bd7aeb1b924","keyword":"Luda ilmenite","originalKeyword":"Luda ilmenite"},{"id":"925b5938-c48f-42b9-a98d-0f2e6813a49b","keyword":"null","originalKeyword":"null"},{"id":"3609cc66-017c-47b7-ba47-02228b371531","keyword":"null","originalKeyword":"null"},{"id":"fb7d041c-374f-4dca-8d2d-8ce172ebbd7e","keyword":"null","originalKeyword":"null"}],"language":"en","publisherId":"1006-7191_1992_7_1","title":"RESEARCH ON <span style=\"color:red\">PLASMA</span> SMELTING OF ILMENITE","volume":"5","year":"1992"},{"abstractinfo":"<span style=\"color:red\">Plasma</span> nitrocarburizing and <span style=\"color:red\">plasma</span> oxidizing treatments were performed to improve the wear and corrosion resistance of SKD 61 steel. <span style=\"color:red\">Plasma</span> nitrocarburizing was conducted for 12 h at 540℃ in the nitrogen, hydrogen and methane atmosphere to produce the ε-Fe2–3 (N,C) phase. The compound layer produced by <span style=\"color:red\">plasma</span> nitrocarburising was predominantly composed of ε-phase, with a small proportion of γ′-Fe4(N,C) phase. The thickness of the compound layer and the diffusion layer are about 10 μm and about 200 μm, respectively. <span style=\"color:red\">Plasma</span> post oxidation was performed on the nitrocarburized samples with various oxygen/hydrogen ratio at constant temperature of 500℃ for 1 h. The very thin magnetite (Fe3O4) layer of 1–2 μm in thickness on top of the compound layer was obtained. Anodic polarization test revealed that <span style=\"color:red\">plasma</span> nitrocarburizing process contributed a significant improvement of corrosion resistance of SKD 61 steel. However, the corrosion characteristics of the nitrocarburized compound layer was deteriorated by oxidation treatment.","authors":[{"authorName":"Insup Lee","id":"bc3cb862-261b-4bfe-94dd-037c35ee13dc","originalAuthorName":"Insup Lee"},{"authorName":" Kwang-Ho Jeong","id":"ea717460-c180-4767-adf1-e4ba854062df","originalAuthorName":" Kwang-Ho Jeong"}],"categoryName":"|","doi":"","fpage":"136","id":"76461062-deb2-45c1-8d9d-273042a82080","issue":"1","journal":{"abbrevTitle":"CLKXJSY","coverImgSrc":"journal/img/cover/JMST.jpg","id":"11","issnPpub":"1005-0302 ","publisherId":"CLKXJSY","title":"材料科学技术（英文）"},"keywords":[{"id":"602bfac4-7e00-4142-a81b-79da6b2b4ac4","keyword":"<span style=\"color:red\">Plasma</span> nitrocarburizing","originalKeyword":"Plasma nitrocarburizing"},{"id":"03b3700e-8340-4b60-bd82-2c2d134fe31d","keyword":"null","originalKeyword":"null"},{"id":"574c1937-4207-4926-8777-be5fbdfc357e","keyword":"null","originalKeyword":"null"},{"id":"daec5163-7eee-40b9-81af-596f8991c297","keyword":"null","originalKeyword":"null"},{"id":"d83ffd21-5f2d-4b51-aa75-8e28ecd165f2","keyword":"null","originalKeyword":"null"},{"id":"c28d34dd-75fb-4836-9677-183f606050af","keyword":"null","originalKeyword":"null"},{"id":"28629043-49a4-4fd0-acfc-e1faa258a761","keyword":"null","originalKeyword":"null"}],"language":"en","publisherId":"1005-0302_2008_1_25","title":"<span style=\"color:red\">Plasma</span> Post Oxidation of <span style=\"color:red\">Plasma</span> Nitrocarburized SKD 61 Steel","volume":"24","year":"2008"},{"abstractinfo":"A new equipment and method for measuring the kinetics of carbon combustion in <span style=\"color:red\">plasma</span> air have been designed. The activation energies of graphite combustion in this condition have been given:  E_1=74.780 kJ / mol (900-1560 K)  E_2=44.720 kJ / mol (1560-2100 K)","authors":[{"authorName":"DU Hegui","id":"c225ca48-cac0-4497-bc02-010a435359d1","originalAuthorName":"DU Hegui"},{"authorName":"LIU Xin","id":"07856621-445e-4e5c-a6eb-d840c305efec","originalAuthorName":"LIU Xin"},{"authorName":" Northeast University of Technology","id":"384e16bb-b97b-4cc9-9e1e-6fa44493be5b","originalAuthorName":" Northeast University of Technology"},{"authorName":" Shenyang","id":"2b19428f-2370-4ba1-888b-56df79180b69","originalAuthorName":" Shenyang"},{"authorName":" China","id":"2ee46ac7-d7e4-40d3-a921-3e67d988909b","originalAuthorName":" China"}],"categoryName":"|","doi":"","fpage":"297","id":"dd741967-ac14-403a-8701-a7c87455452a","issue":"11","journal":{"abbrevTitle":"JSXBYWB","coverImgSrc":"journal/img/cover/amse.jpg","id":"49","issnPpub":"1006-7191","publisherId":"JSXBYWB","title":"金属学报(英文版)"},"keywords":[{"id":"a6e5ca70-0e60-4ada-8b03-7c494e027249","keyword":"carbon","originalKeyword":"carbon"},{"id":"5a382c7b-7fcf-41c8-87f4-28ff34eb086e","keyword":"null","originalKeyword":"null"},{"id":"a5893301-1bc2-4161-82dd-f11389121f22","keyword":"null","originalKeyword":"null"},{"id":"e1c995de-736a-47f6-8fea-351ba263033c","keyword":"null","originalKeyword":"null"}],"language":"en","publisherId":"1006-7191_1989_11_6","title":"KINETICS OF CARBON COMBUSTION IN <span style=\"color:red\">PLASMA</span> AIR","volume":"2","year":"1989"},{"abstractinfo":"In this work, the prerequisite and mode of electromagnetic response of Al nanofilms to electromagnetic wave field was suggested. Reflectance, transmittance in infrared region and carrier density of the films was measured. With the carrier density of the films, the dependence of their <span style=\"color:red\">plasma</span> frequencies on the film thickness was obtained. On the other hand, the dependence of absorptance on the frequency of electromagnetic wave field was set up by using the measured reflectance and transmittance, which provided <span style=\"color:red\">plasma</span> frequency---film thickness relation as well. Similarity of both <span style=\"color:red\">plasma</span> frequency---film thickness relations proved <span style=\"color:red\">plasma</span> resonance as a mode of electromagnetic response in Al nanofilms.","authors":[{"authorName":"Hao DU","id":"d3ecba45-e138-4734-a0da-3b7957e08f33","originalAuthorName":"Hao DU"},{"authorName":" Jun GONG","id":"92dc1a67-0772-450c-9624-6206588d0413","originalAuthorName":" Jun GONG"},{"authorName":" Chao SUN","id":"4f62878b-e8a0-4f9b-8944-4650dfa75a44","originalAuthorName":" Chao SUN"},{"authorName":" Rongfang HUANG","id":"226cf885-e57e-48dd-930f-0267e79f548a","originalAuthorName":" Rongfang HUANG"},{"authorName":" Lishi WEN","id":"ea974a36-b8b8-45f4-bab0-7d86010a19e2","originalAuthorName":" Lishi WEN"},{"authorName":" W.Y.Cheung","id":"88708691-2944-4f02-8a1f-865093f7fbc4","originalAuthorName":" W.Y.Cheung"},{"authorName":" S.P.Wong","id":"e228a4a7-9980-4f8b-b180-19e528d4e92a","originalAuthorName":" S.P.Wong"}],"categoryName":"|","doi":"","fpage":"365","id":"3cb7d1db-1b10-4945-bf28-1e856218eaf8","issue":"4","journal":{"abbrevTitle":"CLKXJSY","coverImgSrc":"journal/img/cover/JMST.jpg","id":"11","issnPpub":"1005-0302 ","publisherId":"CLKXJSY","title":"材料科学技术（英文）"},"keywords":[{"id":"0771e3e7-7522-4bd0-8c14-5e9734ed27e9","keyword":"Aluminum nanofilm","originalKeyword":"Aluminum nanofilm"},{"id":"7c8b5d26-9f5d-430d-9e7d-b33f70031ffa","keyword":"null","originalKeyword":"null"},{"id":"a339a99e-a6f3-4c98-b7b3-57b4bacfc021","keyword":"null","originalKeyword":"null"}],"language":"en","publisherId":"1005-0302_2003_4_22","title":"Carrier Density and <span style=\"color:red\">Plasma</span> Frequency of Aluminum Nanofilms","volume":"19","year":"2003"},{"abstractinfo":"In this work, the prerequisite and mode of electromagnetic response of Al nanofilms to electromagnetic wave field was suggested. Reflectance, transmittance in infrared region and carrier density of the films was measured. With the carrier density of the films, the dependence of their <span style=\"color:red\">plasma</span> frequencies on the film thickness was obtained. On the other hand, the dependence of absorptance on the frequency of electromagnetic wave field was set up by using the measured reflectance and transmittance, which provided <span style=\"color:red\">plasma</span> frequency-film thickness relation as well. Similarity of both <span style=\"color:red\">plasma</span> frequency-film thickness relations proved <span style=\"color:red\">plasma</span> resonance as a mode of electromagnetic response in Al nanofilms.","authors":[],"categoryName":"|","doi":"","fpage":"365","id":"bbd6204a-d831-4252-a760-7b282c7f1e8c","issue":"4","journal":{"abbrevTitle":"CLKXJSY","coverImgSrc":"journal/img/cover/JMST.jpg","id":"11","issnPpub":"1005-0302 ","publisherId":"CLKXJSY","title":"材料科学技术（英文）"},"keywords":[{"id":"56863351-4f19-461e-99dd-26d3475933e7","keyword":"aluminum nanofilm;electromagnetic response;size effect;films;absorption;particles;resonance","originalKeyword":"aluminum nanofilm;electromagnetic response;size effect;films;absorption;particles;resonance"}],"language":"en","publisherId":"1005-0302_2003_4_4","title":"Carrier density and <span style=\"color:red\">plasma</span> frequency of aluminum nanofilms","volume":"19","year":"2003"},{"abstractinfo":"An alumina coating was developed on mild carbon steel by <span style=\"color:red\">plasma</span> spraying and then modified by laser remelting.Some characteristics of <span style=\"color:red\">plasma</span> sprayed ceramic coating before and after laser remelting,such as microstructure,wear resistance, heat shock resistance,hot corrosion property and bond strength,have been investigated in this paper.","authors":[{"authorName":"TAO Zengyi WANG Aihua ZHU Beidi DENG Shijun CHENG Xudong FU Jiangmin Huazhong University of Science and Technology Wuhan","id":"5199f05c-b2fe-4ed9-9daa-2332e02290df","originalAuthorName":"TAO Zengyi WANG Aihua ZHU Beidi DENG Shijun CHENG Xudong FU Jiangmin Huazhong University of Science and Technology Wuhan"},{"authorName":"430074","id":"b44219f4-85ec-476d-a1a0-79c1d17ee774","originalAuthorName":"430074"},{"authorName":"ChinaWuhan Research Institute of Material Protection","id":"aef0baaa-a2a4-4b88-8ef5-4e836085292a","originalAuthorName":"ChinaWuhan Research Institute of Material Protection"},{"authorName":"Wuhan","id":"9a2c50cd-bd03-481c-bb76-5deb14f9f801","originalAuthorName":"Wuhan"},{"authorName":"430000","id":"1b6e78c7-86ae-4948-8d6e-3f8f8efe764b","originalAuthorName":"430000"},{"authorName":"China","id":"4a0eec60-8820-442c-9206-0c35ae376c08","originalAuthorName":"China"}],"categoryName":"|","doi":"","fpage":"325","id":"84d96f26-df51-4164-b608-2387479b6df7","issue":"5","journal":{"abbrevTitle":"CLKXJSY","coverImgSrc":"journal/img/cover/JMST.jpg","id":"11","issnPpub":"1005-0302 ","publisherId":"CLKXJSY","title":"材料科学技术（英文）"},"keywords":[{"id":"a99166e7-bd34-49b1-a6bd-a6e0341db10d","keyword":"<span style=\"color:red\">plasma</span> spraying","originalKeyword":"plasma spraying"},{"id":"cc8cd6fc-5e0f-4acb-9cbb-e009e6214c85","keyword":"null","originalKeyword":"null"},{"id":"a534ff39-3b0e-4f38-b344-6340907b6d7b","keyword":"null","originalKeyword":"null"}],"language":"en","publisherId":"1005-0302_1992_5_6","title":"Laser Modification of <span style=\"color:red\">Plasma</span> Sprayed Alumina Coating","volume":"8","year":"1992"},{"abstractinfo":"This paper deals with the cause of intergranular fracture occurred in the retained austenitic region in <span style=\"color:red\">plasma</span> carburized layer.The results show that the presence of retained austenite, which has a good effect on the impact toughness,has no relation to this embrittlement.Analy- sis by Auger electron spectroscopy shows that the impurities S and P segregate at the grain boundaries is the main reason of the intergranular embrittlement in carburized layer. However,the segregation of P and S can be removed by reheating and quenching treatment.","authors":[{"authorName":"XIA Lifang MA Xinxin Harbin Institute of Technology","id":"8eb94db9-8d23-45db-b533-dc15e51d521c","originalAuthorName":"XIA Lifang MA Xinxin Harbin Institute of Technology"},{"authorName":"Harbin","id":"7ce7b278-ddb5-451b-8e90-23ac00341290","originalAuthorName":"Harbin"},{"authorName":"China","id":"8a39a357-e737-4249-87a3-54e09e0c9aac","originalAuthorName":"China"}],"categoryName":"|","doi":"","fpage":"141","id":"dd7a00da-13fe-46b8-8564-36f27fca3f4d","issue":"2","journal":{"abbrevTitle":"JSXBYWB","coverImgSrc":"journal/img/cover/amse.jpg","id":"49","issnPpub":"1006-7191","publisherId":"JSXBYWB","title":"金属学报(英文版)"},"keywords":[{"id":"92b6a77c-4a70-42ac-94ee-5845d9b61a0b","keyword":"<span style=\"color:red\">plasma</span> carburizing","originalKeyword":"plasma carburizing"},{"id":"47669f24-0787-4632-aa79-76e6e85e6fcb","keyword":"null","originalKeyword":"null"},{"id":"d52ba90e-85f4-4d10-b4a9-f12ec249e60a","keyword":"null","originalKeyword":"null"},{"id":"e7879c30-a8d5-4c88-a920-15c73db21fa9","keyword":"null","originalKeyword":"null"}],"language":"en","publisherId":"1006-7191_1992_2_1","title":"INTERGRANULAR EMBRITTLEMENT IN <span style=\"color:red\">PLASMA</span> CARBURIZED LAYER","volume":"5","year":"1992"},{"abstractinfo":"The research on <span style=\"color:red\">plasma</span> immersion ion implantation has been conducted for a little over ten years. Much is needed to investigate including processing technlogy, <span style=\"color:red\">plasma</span> sheath dynamics, interaction of <span style=\"color:red\">plasma</span> and surface, etc. Of the processing methods elavated temperature technique is usually used in PIII to produce a thick modified layer by means of the thermal diffusion. Meanwhile <span style=\"color:red\">plasma</span> ion heating is more recently developed by Ronghua Wei et al[1]. Therefore the temeperature is a critical parameter in <span style=\"color:red\">plasma</span> ion processing. In this paper we present the theoretical model and analysize the effect of imlantation voltage, <span style=\"color:red\">plasma</span> density, ion mass,etc on the temperature rise.","authors":[{"authorName":"X.B. Tian","id":"89052056-535d-43a4-9256-d3bf855e4e69","originalAuthorName":"X.B. Tian"},{"authorName":" X.F. Wang","id":"3600f924-9e09-406f-bc46-d69a4ec53778","originalAuthorName":" X.F. Wang"},{"authorName":" A.G. Liu","id":"e4551bd7-f727-46ed-8973-9b0e1cb63952","originalAuthorName":" A.G. Liu"},{"authorName":" L.P. Wang","id":"e6bdd8e0-3b34-4850-a66c-39093911ee4e","originalAuthorName":" L.P. Wang"},{"authorName":" S. Y. Wang","id":"3ec9c251-75e9-4402-9ba4-3a8f15c4b0f1","originalAuthorName":" S. Y. Wang"},{"authorName":" B. Y. Tang and P. K. Chu 1)Advanced Welding Production & Technology National Key Laboratory","id":"0d0ae211-041e-471d-99d2-a31e9249fc7f","originalAuthorName":" B. Y. Tang and P. K. Chu 1)Advanced Welding Production & Technology National Key Laboratory"},{"authorName":" Harbin Institute of Technology","id":"3e804451-4283-4393-9c99-92acffa1c87f","originalAuthorName":" Harbin Institute of Technology"},{"authorName":" Harbin 150001","id":"395fb842-b199-4aba-82a9-6e2b8f597648","originalAuthorName":" Harbin 150001"},{"authorName":" China 2)Department of Physics & Materials Science","id":"72f61853-dc42-4a3e-9443-4282d3279c01","originalAuthorName":" China 2)Department of Physics & Materials Science"},{"authorName":" City University of Hong Kong","id":"c5395c44-852b-4d7b-9bfb-c7249709a43d","originalAuthorName":" City University of Hong Kong"},{"authorName":" China","id":"9f408b6d-0f8d-47c9-9560-402243c66ec8","originalAuthorName":" China"}],"categoryName":"|","doi":"","fpage":"734","id":"9b987a38-84e1-49c2-b590-0eb0691ca6d9","issue":"2","journal":{"abbrevTitle":"JSXBYWB","coverImgSrc":"journal/img/cover/amse.jpg","id":"49","issnPpub":"1006-7191","publisherId":"JSXBYWB","title":"金属学报(英文版)"},"keywords":[{"id":"a0d6146e-832a-4ce3-b057-ac3a9db9dd48","keyword":"<span style=\"color:red\">plasma</span> immersion ion implantation","originalKeyword":"plasma immersion ion implantation"},{"id":"503427cb-d0c9-4193-a762-c5f005e8918b","keyword":"null","originalKeyword":"null"},{"id":"e833d3de-8f30-4c10-9101-f09800f53d08","keyword":"null","originalKeyword":"null"}],"language":"en","publisherId":"1006-7191_2000_2_27","title":"ION HEATING PROCESS DURING <span style=\"color:red\">PLASMA</span> IMMERSION ION IMPLANTATION","volume":"13","year":"2000"},{"abstractinfo":"This article discusses the silicon lattice damage induced during H-<span style=\"color:red\">plasma</span> in-situ cleaning and finds that the substrate temperature, <span style=\"color:red\">plasma</span> power, processing time, all affect the extent of the distortion of the surface and its curability.","authors":[{"authorName":"Chenguang GONG+","id":"53da13ff-d826-47ef-a29e-02cd6ff6c6f0","originalAuthorName":"Chenguang GONG+"},{"authorName":"Fuchu SHEN","id":"380ffa3f-823e-4702-b074-3b13a59318a4","originalAuthorName":"Fuchu SHEN"},{"authorName":"Biguang YE","id":"7a8d5097-0901-4b44-a449-3c3dcc753410","originalAuthorName":"Biguang YE"},{"authorName":"Jian CHEN","id":"18abe53b-ea65-41a4-aab3-aea2da2e6445","originalAuthorName":"Jian CHEN"},{"authorName":" Zhenjiang University","id":"ed74739e-d7be-48b9-9770-ebce9023c4d2","originalAuthorName":" Zhenjiang University"},{"authorName":" Hangzhou","id":"09e3cc58-3ab9-4b0c-9c04-276b564e7422","originalAuthorName":" Hangzhou"},{"authorName":" 310027","id":"341a56f2-872d-4baa-8000-49e1cb771cf4","originalAuthorName":" 310027"},{"authorName":" China","id":"71d18843-8ea2-420d-8ea6-75e34cbb8ddc","originalAuthorName":" China"}],"categoryName":"|","doi":"","fpage":"133","id":"a373459d-27e6-42ad-8531-25c1110b5dd0","issue":"2","journal":{"abbrevTitle":"CLKXJSY","coverImgSrc":"journal/img/cover/JMST.jpg","id":"11","issnPpub":"1005-0302 ","publisherId":"CLKXJSY","title":"材料科学技术（英文）"},"keywords":[{"id":"ee6bf9c3-e7fd-47cb-ae56-4dd5c7f8c2ad","keyword":"H-<span style=\"color:red\">plasma</span> cleaning","originalKeyword":"H-plasma cleaning"},{"id":"50ca865c-5b2d-44b5-b38e-88e3a992efa0","keyword":"null","originalKeyword":"null"},{"id":"2f2a07b9-07e7-4f3d-a9be-0fb85ce10315","keyword":"null","originalKeyword":"null"},{"id":"78c6deca-0d29-45f3-ae93-a4c4aee4c7b4","keyword":"null","originalKeyword":"null"}],"language":"en","publisherId":"1005-0302_1993_2_5","title":"H-<span style=\"color:red\">plasma</span> In-situ Cleaning and Lattice Damage Elimination","volume":"9","year":"1993"}],"totalpage":58,"totalrecord":579}