{"currentpage":1,"firstResult":0,"maxresult":10,"pagecode":5,"pageindex":{"endPagecode":5,"startPagecode":1},"records":[{"abstractinfo":"综述了氮化硅在微电子中的应用、制备,阐述了用氮气直接氮化的影响因素、膜生长的机理和动力学,以及未来的研究方向.","authors":[{"authorName":"祝洪良","id":"6365c8bf-e57a-4d8c-817a-77d0ef8210a2","originalAuthorName":"祝洪良"},{"authorName":"裴艳丽","id":"90213308-1af4-4bda-8902-f4e61e98b584","originalAuthorName":"裴艳丽"},{"authorName":"杨德仁","id":"896ff639-9690-4adc-be0e-7927c1edf853","originalAuthorName":"杨德仁"}],"doi":"","fpage":"34","id":"42861480-b5ec-4b7c-8029-ff557ffb5843","issue":"12","journal":{"abbrevTitle":"CLDB","coverImgSrc":"journal/img/cover/CLDB.jpg","id":"8","issnPpub":"1005-023X","publisherId":"CLDB","title":"材料导报"},"keywords":[{"id":"5fae8354-a294-403a-a811-330485c0df84","keyword":"氮化硅","originalKeyword":"氮化硅"},{"id":"9c3bff08-4083-4c65-8d63-ce139d8295ff","keyword":"氮化","originalKeyword":"氮化"},{"id":"e030de44-0db1-4214-aa6a-229146348151","keyword":"动力学","originalKeyword":"动力学"},{"id":"38103b30-7d6a-4b93-b6bb-6e775046bf2a","keyword":"<span style=\"color:red\">硅</span><span style=\"color:red\">生</span>","originalKeyword":"硅生"},{"id":"7e120334-c871-4f24-85c6-2c40ffc42b59","keyword":"长机理","originalKeyword":"长机理"}],"language":"zh","publisherId":"cldb200212011","title":"氮化硅薄膜制备和生长动力学研究进展","volume":"16","year":"2002"},{"abstractinfo":"<span style=\"color:red\">硅</span>中的氧化诱<span style=\"color:red\">生</span>层错(OsF)是一种重要的工艺诱<span style=\"color:red\">生</span>缺陷,会对微电子器件产生重大影响,为提高硅片质量.要求对OSF有充分了解.综述了氧化诱<span style=\"color:red\">生</span>层错的研究进展,着重讨论了 OSF的形成动力学、影响因素和检测方法.并指出:OSF是一种由点缺陷行为决定的工艺诱<span style=\"color:red\">生</span>缺陷.","authors":[{"authorName":"储佳","id":"6e9341c2-129f-4d75-b41a-8181e87880ea","originalAuthorName":"储佳"},{"authorName":"杨德仁","id":"0d5ad00b-c8c2-4346-a2bf-8592af6c5af8","originalAuthorName":"杨德仁"},{"authorName":"阙端麟","id":"9b50e181-45ce-4ced-9896-49f69ae5548e","originalAuthorName":"阙端麟"}],"doi":"","fpage":"35","id":"8b695e58-0b5c-47c3-9780-abc46acc07c1","issue":"11","journal":{"abbrevTitle":"CLDB","coverImgSrc":"journal/img/cover/CLDB.jpg","id":"8","issnPpub":"1005-023X","publisherId":"CLDB","title":"材料导报"},"keywords":[{"id":"12d0001b-c75b-4ac4-8b79-21a50222d664","keyword":"氧化诱<span style=\"color:red\">生</span>层错","originalKeyword":"氧化诱生层错"},{"id":"b64d492e-9c4b-4a07-bf12-204a4ebbdf38","keyword":"直拉硅单晶","originalKeyword":"直拉硅单晶"},{"id":"7f364e89-86a4-440c-814a-62f6a5ef31e3","keyword":"氧沉淀","originalKeyword":"氧沉淀"}],"language":"zh","publisherId":"cldb200111013","title":"直拉<span style=\"color:red\">硅</span>中氧化诱<span style=\"color:red\">生</span>层错研究进展","volume":"15","year":"2001"},{"abstractinfo":"采用直拉法生长普通硅单晶和掺氮硅单晶, 研究两种晶体中空位型原生缺陷(voids)和氧化诱<span style=\"color:red\">生</span>层错(OSFs)的行为. 从两种晶体的相同位置取样, 并对样品进行Secco腐蚀、 1100℃湿氧氧化和铜缀饰实验. 实验结果表明, 在掺氮硅单晶中与较大尺寸的voids相关的流动图形缺陷(FPDs)的密度变小, 氧化诱<span style=\"color:red\">生</span>层错环(OSF-ring)向样片中心处移动, 同时宽度变大. 这说明在直拉<span style=\"color:red\">硅</span>中掺氮可以抑制大尺寸voids的产生, 同时可以缩小空位型缺陷区的范围, 而且V/I过渡区(OSF-ring)的范围变大.","authors":[{"authorName":"韩海建","id":"3f52f2a4-a630-4033-b39c-aa07402e0d64","originalAuthorName":"韩海建"},{"authorName":"周旗钢","id":"ac0456fc-b265-41d8-86fb-30e6e475ba54","originalAuthorName":"周旗钢"},{"authorName":"戴小林","id":"0379dfe1-fb7b-4176-bf02-7333f09417db","originalAuthorName":"戴小林"},{"authorName":"肖清华","id":"a53f6492-dbf0-4ab3-8a95-3460f4d6deaa","originalAuthorName":"肖清华"}],"doi":"10.3969/j.issn.0258-7076.2007.06.005","fpage":"746","id":"a6e54ef5-afa2-4d64-8924-6744a875b780","issue":"6","journal":{"abbrevTitle":"XYJS","coverImgSrc":"journal/img/cover/XYJS.jpg","id":"67","issnPpub":"0258-7076","publisherId":"XYJS","title":"稀有金属"},"keywords":[{"id":"c24ba846-8b65-4a2a-9d2b-6bd06b0fb8dc","keyword":"300 mm","originalKeyword":"300 mm"},{"id":"5e1ae047-3cd3-42e6-aacb-c37780aef574","keyword":"流动图形缺陷","originalKeyword":"流动图形缺陷"},{"id":"69011395-dfb2-47e1-b3f2-302b4e567538","keyword":"氧化诱<span style=\"color:red\">生</span>层错环","originalKeyword":"氧化诱生层错环"},{"id":"f7dcc270-9708-496c-a83a-24b412d5fa22","keyword":"掺氮","originalKeyword":"掺氮"}],"language":"zh","publisherId":"xyjs200706005","title":"掺氮对300 mm单晶<span style=\"color:red\">硅</span>中流动图形缺陷和氧化诱<span style=\"color:red\">生</span>层错的影响","volume":"31","year":"2007"},{"abstractinfo":"采用直拉法生长普通和掺氮硅单晶,研究不同含氮浓度的晶体中氧化诱<span style=\"color:red\">生</span>层错(OSF)的行为.从4组晶体的相同位置取样,并对样品进行1100℃湿氧氧化实验.实验结果表明,随着晶体中氮浓度的增加样品中氧化诱<span style=\"color:red\">生</span>层错环(OSF-ring)宽度变大,且环内OSF缺陷的密度增加.这说明,氮的掺入促进了晶体中满足OSF形核要求的原生氧沉淀的形成,使OSF形核区变大.","authors":[{"authorName":"韩海建","id":"f5dd8933-4000-4400-bae3-46ea003ef9ce","originalAuthorName":"韩海建"},{"authorName":"周旗钢","id":"daead31e-22ff-456a-a6e7-3668e261f71c","originalAuthorName":"周旗钢"},{"authorName":"戴小林","id":"20b941f7-9137-4087-b2b1-855ff37d2859","originalAuthorName":"戴小林"}],"doi":"10.3969/j.issn.0258-7076.2009.02.017","fpage":"223","id":"3f1b0e22-b7f7-4daa-9d5a-4129d06fb142","issue":"2","journal":{"abbrevTitle":"XYJS","coverImgSrc":"journal/img/cover/XYJS.jpg","id":"67","issnPpub":"0258-7076","publisherId":"XYJS","title":"稀有金属"},"keywords":[{"id":"e65e72e8-802e-4344-82e6-dab8abb39fae","keyword":"掺氮","originalKeyword":"掺氮"},{"id":"c6089bab-4ed5-41af-a050-87d931a0ef47","keyword":"300mm","originalKeyword":"300mm"},{"id":"7208b420-9166-427f-a1a4-1692c11dc3b1","keyword":"氧化诱<span style=\"color:red\">生</span>层错(OSF)","originalKeyword":"氧化诱生层错(OSF)"},{"id":"33e8c101-8a63-4d59-837f-93d9ed4c68b1","keyword":"直拉单晶<span style=\"color:red\">硅</span>","originalKeyword":"直拉单晶硅"}],"language":"zh","publisherId":"xyjs200902017","title":"300 mm直拉单晶<span style=\"color:red\">硅</span>中的氮元素对氧化诱<span style=\"color:red\">生</span>层错的影响","volume":"33","year":"2009"},{"abstractinfo":"采用Fe/Al-Si扩散偶的方法,利用SEM-WDS,研究了550℃<span style=\"color:red\">硅</span>在Fe/Al固态扩散反应中对Fe2Al5<span style=\"color:red\">生</span>长动力学的影响.实验结果表明,铝中<span style=\"color:red\">硅</span>含量不超过1.5 wt%时,扩散层中只出现Fe2Al5相,其生长动力学符合抛物线关系,实验测定的铁和铝在Fe2Al5中的综合扩散系数(D)在含<span style=\"color:red\">硅</span>量(wt%)分别为0、0.5、1.0和1.5时,分别为3.46×10-15、2.61×10-15、1.28×10-15和0.86×10-15m2/s.随<span style=\"color:red\">硅</span>含量增加,其抑制Fe2Al5相生长速度的效果明显加强.当铝中Si含量为2%和3%时,首先出现Fe2Al5相.随扩散时间的延长,在Fe2Al5相靠近Al-Si的一侧依次出现了T1/T9和T5相,化合物层生长速度明显加快.由于部分<span style=\"color:red\">硅</span>以三元化合物的形式存在,导致<span style=\"color:red\">硅</span>的抑制作用下降.","authors":[{"authorName":"韩炜","id":"b0713e9a-50f6-4d7a-ba0d-cb7dd8f28fd2","originalAuthorName":"韩炜"},{"authorName":"尹付成","id":"646de4b4-05e6-489b-8099-6ec51f47760e","originalAuthorName":"尹付成"},{"authorName":"苏旭平","id":"e8c73a7e-b6f8-4993-b7f0-8f035f98c4df","originalAuthorName":"苏旭平"},{"authorName":"王建华","id":"335018f4-ac93-407a-9751-adc303198fbc","originalAuthorName":"王建华"},{"authorName":"徐琛","id":"f3393dac-c580-48c2-ba20-8283d70df3fc","originalAuthorName":"徐琛"}],"doi":"","fpage":"28","id":"c9ce3cf3-9cc8-4e98-9824-6cd2e76a64ed","issue":"6","journal":{"abbrevTitle":"CLRCLXB","coverImgSrc":"journal/img/cover/CLRCLXB.jpg","id":"15","issnPpub":"1009-6264","publisherId":"CLRCLXB","title":"材料热处理学报"},"keywords":[{"id":"70de2b29-0550-4c01-9086-fe37e6589b9c","keyword":"Fe2Al5","originalKeyword":"Fe2Al5"},{"id":"7f4d8b61-cba2-4ab7-925f-ddcd47098ec0","keyword":"Si","originalKeyword":"Si"},{"id":"a7a2f8ee-3177-428d-8a08-01667bc02686","keyword":"扩散偶","originalKeyword":"扩散偶"},{"id":"1947dc8a-52a1-4c9f-b2b1-3433fd9fa7da","keyword":"动力学","originalKeyword":"动力学"},{"id":"e9faf20b-353d-4b72-92b2-f376c2d71e85","keyword":"扩散系数","originalKeyword":"扩散系数"}],"language":"zh","publisherId":"jsrclxb201006006","title":"<span style=\"color:red\">硅</span>对Fe/Al固态扩散反应中Fe2 Al5<span style=\"color:red\">生</span>长动力学的影响","volume":"31","year":"2010"},{"abstractinfo":"植<span style=\"color:red\">生</span>混凝土已经被用于河岸护坡、公路护边、停车场、屋顶绿化、建筑物墙面绿化等工程中.它对生态平衡和自然环境的保护具有积极作用.此外,植<span style=\"color:red\">生</span>混凝土作为建筑材料的同时,在净化水质、修复生态环境、水土保持、调节环境温度等方面发挥着积极的作用.通过对国内外资料的分析,综述了植<span style=\"color:red\">生</span>混凝土的概念、特点、研究现状和工程应用情况,并提出了植<span style=\"color:red\">生</span>混凝土未来需研究的问题,对进一步深入研发和推广应用具有积极意义.","authors":[{"authorName":"王俊岭","id":"fa0700b3-bb87-46f2-94bf-ed3e6e89ba2f","originalAuthorName":"王俊岭"},{"authorName":"王雪明","id":"6f4450a4-3c48-4fd6-b850-02a5ac620f88","originalAuthorName":"王雪明"},{"authorName":"冯萃敏","id":"5faa37f6-95c4-468b-ab4d-7ebb684d119c","originalAuthorName":"冯萃敏"},{"authorName":"李颖娜","id":"a1b59034-06ac-4fad-9405-a97b7f10e755","originalAuthorName":"李颖娜"},{"authorName":"赵欣","id":"26a7bb4f-8f84-4f9b-bb72-fee29c8d6d91","originalAuthorName":"赵欣"}],"doi":"","fpage":"1915","id":"aa05f8a0-3906-404d-9943-cc1b9ff13a49","issue":"7","journal":{"abbrevTitle":"GSYTB","coverImgSrc":"journal/img/cover/GSYTB.jpg","id":"36","issnPpub":"1001-1625","publisherId":"GSYTB","title":"硅酸盐通报   "},"keywords":[{"id":"8d6522ac-4920-48eb-b486-88c6241eee55","keyword":"植<span style=\"color:red\">生</span>混凝土","originalKeyword":"植生混凝土"},{"id":"ab7d07c3-54ed-4a66-92fd-d1eac750483b","keyword":"降碱","originalKeyword":"降碱"},{"id":"6e8477cd-6afa-4bcc-adef-61fe50e927be","keyword":"填料","originalKeyword":"填料"},{"id":"c80892e2-c122-43da-a975-272083092dd9","keyword":"强度","originalKeyword":"强度"},{"id":"79a9003a-fdfa-49cd-acc0-391104f8091e","keyword":"应用","originalKeyword":"应用"}],"language":"zh","publisherId":"gsytb201507032","title":"植<span style=\"color:red\">生</span>混凝土的研究进展","volume":"34","year":"2015"},{"abstractinfo":"氮化钒是VT包芯线粉芯材料的一种,使用中对其粒度有严格要求,经过破碎后会产生很多细粉,不能直接使用.为充分利用细粉,拟定分级-造粒-干燥工艺对氮化钒粉末进行处理,干燥工艺是很重要的工序.分析干燥温度、原料粒径、初含水率以及粘合剂配比对氮化钒<span style=\"color:red\">生</span>球干燥过程的影响,并探讨<span style=\"color:red\">生</span>球干燥过程,发现干燥速度与时间的关系曲线呈\"单峰\"状和\"双峰\"状,分析这种现象的原因.","authors":[{"authorName":"陈泽民","id":"1240a141-e0fd-416a-83e4-6bee8d86f361","originalAuthorName":"陈泽民"},{"authorName":"孙涛","id":"7e679454-4702-4f2f-8315-8bba2d1df3f9","originalAuthorName":"孙涛"},{"authorName":"李松","id":"79ff5f8a-e9ab-4d2c-be41-302cc8ed6e59","originalAuthorName":"李松"},{"authorName":"柏万春","id":"5aecc39c-6cd5-4cb5-bd24-443b43cc7172","originalAuthorName":"柏万春"}],"doi":"10.3969/j.issn.1004-244X.2009.03.010","fpage":"30","id":"225950b7-a3d7-4360-bfc0-90d39832a1e0","issue":"3","journal":{"abbrevTitle":"BQCLKXYGC","coverImgSrc":"journal/img/cover/BQCLKXYGC.jpg","id":"4","issnPpub":"1004-244X","publisherId":"BQCLKXYGC","title":"兵器材料科学与工程   "},"keywords":[{"id":"9f47f244-5693-43e5-96a1-94b36c09612d","keyword":"氮化钒","originalKeyword":"氮化钒"},{"id":"c970266f-33dd-4ab9-bb2a-0c45701776d4","keyword":"干燥","originalKeyword":"干燥"},{"id":"74d8ef4b-cb46-4f98-80b7-fca94df57601","keyword":"干燥速度曲线","originalKeyword":"干燥速度曲线"}],"language":"zh","publisherId":"bqclkxygc200903010","title":"氮化钒<span style=\"color:red\">生</span>球干燥过程研究","volume":"32","year":"2009"},{"abstractinfo":"采用人工神经网络研究了在不同型温、 浇温和转速条件下以离心法制备Al-16%Si FGM时初晶<span style=\"color:red\">硅</span>的分布规律， 并通过实验进行了验证。 在建立神经网络模型时， 以型温、 浇温、 转速等工艺参数作为人工神经网络的输入， 以内<span style=\"color:red\">生</span>初晶<span style=\"color:red\">硅</span>分布的相对厚度作为输出。 实验表明， 预测结果与实际测定结果比较吻合， 说明采用神经网络预测离心法制备梯度功能材料中内<span style=\"color:red\">生</span>颗粒的分布是可行的。","authors":[{"authorName":"于思荣","id":"50c23902-3675-410e-ab7a-8c8788910b15","originalAuthorName":"于思荣"},{"authorName":"张新平","id":"84cac337-400d-47d5-9abb-e01f9cdf1709","originalAuthorName":"张新平"},{"authorName":"何镇明","id":"f794afb9-5c0c-49c5-801a-bdfe7ebae73b","originalAuthorName":"何镇明"}],"doi":"","fpage":"216","id":"3125ce75-ec6b-47fa-be25-4d0f5d8db6f9","issue":"2","journal":{"abbrevTitle":"ZGYSJSXB","coverImgSrc":"journal/img/cover/ZGYSJSXB.jpg","id":"88","issnPpub":"1004-0609","publisherId":"ZGYSJSXB","title":"中国有色金属学报"},"keywords":[{"id":"6bb504ee-5456-4cbd-a361-d81767c35d03","keyword":"离心法","originalKeyword":"离心法"},{"id":"150db969-28d9-4f46-88d0-1ae447e36628","keyword":"梯度功能材料","originalKeyword":"梯度功能材料"},{"id":"439be07b-3571-47bd-a50f-71889c99e172","keyword":"人工神经网络","originalKeyword":"人工神经网络"},{"id":"e55068a8-5a86-4168-a20e-453fa1580aa7","keyword":"内<span style=\"color:red\">生</span>颗粒","originalKeyword":"内生颗粒"},{"id":"67b31992-92aa-421d-97e2-207aad1afb74","keyword":"颗粒分布","originalKeyword":"颗粒分布"}],"language":"zh","publisherId":"zgysjsxb200102012","title":"离心法制备梯度功能材料中内<span style=\"color:red\">生</span>颗粒的分布","volume":"11","year":"2001"},{"abstractinfo":"以转速、型温、浇温等工艺参数作为神经模糊预测系统的输入,内<span style=\"color:red\">生</span>初晶<span style=\"color:red\">硅</span>分布的相对厚度作为输出,采用模糊推理研究了离心法制备Al-16%Si FG M中初晶<span style=\"color:red\">硅</span>分布的规律,并通过实验法进行了验证.预测结果与实际测定结果的对比是令人满意的.这说明采用模糊推理预测离心法制备梯度功能材料中内<span style=\"color:red\">生</span>颗粒的分布是可行的.","authors":[{"authorName":"于思荣","id":"68946992-d47e-42e3-90b9-e3a2e13a5819","originalAuthorName":"于思荣"},{"authorName":"张新平","id":"7e0d75b9-d477-4a83-84a4-f9c017f42ab6","originalAuthorName":"张新平"},{"authorName":"何镇明","id":"de4f0e99-086a-469a-8bb8-05aff89ee7c2","originalAuthorName":"何镇明"},{"authorName":"李蕊","id":"341db354-9dd3-47cc-b3c9-04ddd3e44061","originalAuthorName":"李蕊"}],"doi":"10.3321/j.issn:1000-3851.2002.03.013","fpage":"61","id":"e0858ceb-9794-4895-bee8-936b1f28a782","issue":"3","journal":{"abbrevTitle":"FHCLXB","coverImgSrc":"journal/img/cover/FHCLXB.jpg","id":"26","issnPpub":"1000-3851","publisherId":"FHCLXB","title":"复合材料学报"},"keywords":[{"id":"3e36f51f-5942-460f-b5a8-5a2ddd459984","keyword":"离心法","originalKeyword":"离心法"},{"id":"f83f09f1-6474-4ace-b2d7-0c5b203110d5","keyword":"梯度功能材料","originalKeyword":"梯度功能材料"},{"id":"0bb105f3-c3a5-454c-89d4-9f36b1ea4ecd","keyword":"模糊预测","originalKeyword":"模糊预测"},{"id":"fa5bc67c-2f60-4d32-ad2f-e48c4101c7e0","keyword":"内<span style=\"color:red\">生</span>颗粒","originalKeyword":"内生颗粒"},{"id":"88a0bf28-7a9b-4cef-ab99-adc561e868f8","keyword":"分布相对厚度","originalKeyword":"分布相对厚度"}],"language":"zh","publisherId":"fhclxb200203013","title":"离心法制备梯度功能材料中内<span style=\"color:red\">生</span>颗粒分布的模糊预测","volume":"19","year":"2002"},{"abstractinfo":"用XRD、SEM、ICP、TG等分析手段对生、煅磁石的物相、元素含量、形貌、晶粒大小、比表面积等进行了分析与比较.结果表明,磁石煅烧后保持了原有的主要物相Fe3O4,而Fe2O3基本消失,有害元素Cd和Pb含量明显降低,晶粒变大(从24.5 nm提高到35.7 nm),表面变疏松.与煅磁石在加热过程中一次失重相比,<span style=\"color:red\">生</span>磁石加热过程中,在367.9～422.1℃和568.8～594.1℃之间出现了2个失重台阶.","authors":[{"authorName":"李钢","id":"7f860eae-2d48-4722-a176-6fa6b60618d8","originalAuthorName":"李钢"},{"authorName":"金同顺","id":"86b95a41-43d5-4fe2-92dd-a989439f80df","originalAuthorName":"金同顺"},{"authorName":"尤娟","id":"c1d27216-9e74-46ff-b9f1-aa3b708a04e7","originalAuthorName":"尤娟"},{"authorName":"王露","id":"961fa44a-d324-4667-9f15-8b4c9dd5b547","originalAuthorName":"王露"},{"authorName":"吴启南","id":"67987aeb-cccc-4ddc-b4ad-218342bdcb92","originalAuthorName":"吴启南"}],"doi":"10.3969/j.issn.1000-0518.2005.11.014","fpage":"1230","id":"34262a0e-3030-4ec3-9d10-a38f01c87d46","issue":"11","journal":{"abbrevTitle":"YYHX","coverImgSrc":"journal/img/cover/YYHX.jpg","id":"73","issnPpub":"1000-0518","publisherId":"YYHX","title":"应用化学"},"keywords":[{"id":"057dd3fb-8921-468a-85cf-1f3ae48b2d82","keyword":"中药","originalKeyword":"中药"},{"id":"b4e5bac7-4da4-4573-bf74-7ebbb4b9a937","keyword":"磁石","originalKeyword":"磁石"},{"id":"7c2c3025-8b03-4623-9d50-0ed29af0ba2d","keyword":"X射线粉末衍射","originalKeyword":"X射线粉末衍射"},{"id":"e221e547-d474-41c6-87c9-3eddfff00268","keyword":"扫描电镜","originalKeyword":"扫描电镜"},{"id":"8bc4e226-590e-4604-8b61-ed8a77ed3324","keyword":"微量元素","originalKeyword":"微量元素"}],"language":"zh","publisherId":"yyhx200511014","title":"<span style=\"color:red\">生</span>、煅磁石的分析与比较","volume":"22","year":"2005"}],"totalpage":889,"totalrecord":8886}