刘超英
,
陈玮
,
徐志伟
,
付静
,
左岩
,
马眷荣
功能材料
doi:10.3969/j.issn.1001-9731.2015.07.011
采用磁控溅射方法在玻璃衬底上使用掺杂3％(质量分数)Al2 O 3的 ZnO 陶瓷靶材制备出了掺铝氧化锌(ZnO ∶ Al,AZO)透明导电薄膜.分别用XRD、SEM、四探针测试仪、紫外-可见分光光度计对薄膜的性能进行了表征和分析.研究了溅射过程中不同氩气压强(0．3~1．2 Pa)对薄膜结构、形貌及光电性能的影响.XRD 测试结果表明,所制备的薄膜均具有呈c 轴择优取向的纤锌矿结构.当氩气压强为0．3 Pa时,AZO 薄膜的电阻率最低为6．72×10－4Ω?cm.所有样品在可见光波段的平均透过率超过85％.
关键词:
氩气压力
,
射频磁控溅射
,
AZO 薄膜
,
光电性能
Xianwu XIU
,
Zhiyong PANG
,
Maoshui LV
,
Ying DAI
,
Li′na YE
,
Shenghao HAN
,
null
,
null
,
null
,
null
,
null
,
null
,
null
材料科学技术（英文）
Transparent conducting oxide film of molybdenum-doped zinc oxide (MZO) with high transparency and relatively low resistivity was prepared by RF (radio frequency) magnetron sputtering at room temperature. The structural, electrical, and optical properties of the films deposited under different Ar pressure were investigated. XRD (X-ray diffraction) patterns show that the nature of the films is polycrystalline with a hexagonal structure and a preferred orientation along the c-axis. The resistivity increases as Ar pressure increases. The lowest resistivity achieved is 9.2×10-4 Ω•cm for the samples deposited at Ar pressure of 0.6 Pa with a Hall mobility of 30 cm2•V-1•s-1 and a carrier concentration of 2.3×1020 cm-3. The average transmittance in the visible range exceeds 88% for all the samples. The optical band gap decreases from 3.27 to 3.15 eV with increasing Ar pressure from 0.6 to 3.0 Pa.
关键词:
zinc oxide
,
null
,
null
