Rongfa CHEN
,
Dunwen ZUO
,
Feng XU
,
Duoseng LI
,
Min WANG
材料科学技术（英文）
The contacting interface between the substrate and water-cooled base is vital to the substrate temperature during diamond films deposition by a DC (direct current) plasma jet. The effects of the solid contacting area, conductive materials and fixing between the substrate and the base were investigated without affecting the other parameters. Experimental results indicated that the preferable solid contacting area was more than 60% of total contacting areal; the particular Sn-Pb alloy was more suitable for conducting heat and the concentric fixing ring was a better setting for controlling the substrate temperature. The result was explained in terms of the variable thermal contact resistance at the interface between substrate and base. The diamond films were analyzed by scanning electron microscopy (SEM) for morphology, X-ray diffraction (XRD) for the intensity of characteristic spectroscopy and Raman spectroscopy for structure.
关键词:
diamond films
,
基体温度
,
连接界面
,
直流等离子体
黑立富
,
闫雄伯
,
朱瑞华
,
陈良贤
,
刘金龙
,
魏俊俊
,
廉伟艳
,
张荣实
,
李成明
材料工程
doi:10.11868/j.issn.1001-4381.2016.000792
由于金刚石具有低吸收和优异的力学与导热性能使其成为长波(8~12μm)红外光学窗口材料的重要选择.对于许多极端条件的应用,化学气相沉积(CVD)金刚石自支撑膜的高温光学性质至关重要.应用直流电弧等离子喷射法制备光学级金刚石自支撑膜进行变化温度的红外光学透过性能研究,采用光学显微镜、X射线衍射、激光拉曼和傅里叶变换红外-拉曼光谱仪检测CVD金刚石膜的表面形貌、结构特征和红外光学性能.结果表明:在27℃时金刚石膜长波红外8~12μm之间的平均透过率达到65.95%,在500℃时8~12μm处的平均透过率为52.5%.透过率下降可分为3个阶段.对应于透过率随温度的下降,金刚石膜的吸收系数随温度的升高而增加.金刚石自支撑膜表面状态的变化,对金刚石膜光学性能的影响显著大于内部结构的影响.
关键词:
直流电弧等离子喷射
,
金刚石自支撑膜
,
高温红外透过
