J.S. Lee
材料科学技术（英文）
Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) has been widely adopted for the direct multi-elemental analysis with high sensitivity. Especially analysis of fine ceramics by LA-ICP-MS without time-consuming sample decomposition process has been one of the most expecting application field. Small additive elements in MgO powders were analyzed by LA-ICP-MS. For precise and accurate analysis influence of carrier gas (Ar or He) was presented by the signal intensities of ICP-MS, relative standard deviation of signal intensities and ablated particle size distribution. Ablated particles were collected and analyzed by scanning electron microscopy (SEM) to investigate the particle size distribution, and the ablated sample surface was examined by camscope. In He gas atmosphere, the signal was more stable than in Ar gas atmosphere. The signal intensity was higher in Ar than in He. Examination of ablated particles and sample surface reveals that more particles were generated in Ar atmosphere and the distribution of particle size was larger.
关键词:
Laser ablation
韦波
,
王瑞
,
吴敢
,
杨建平
宇航材料工艺
doi:10.3969/j.issn.1007-2330.2015.01.014
为解决陶瓷基底金属薄膜一体化部件的激光微加工精度问题,研究了纳秒脉冲激光作用于Cu(Ni80 Cr20)-Al2 O3复合机体的薄膜/基底界面分离机制.结果表明:激光刻蚀Cu时,光斑扫过的区域的Cu能够完全气化,得到较光滑的图案;在刻蚀Ni80Cr20时,光斑扫过的区域首先被氮化,随后氮化层剥离,导致刻蚀图形边沿粗糙.激光光斑能量呈高斯分布,使得Ni80Cr20氮化程度不均匀,是影响刻蚀精度的主要原因.利用波前衍射变换技术将光斑能量由高斯分布转换为能量呈平顶分布,在激光能量大于5.4mJ时,厚度4μm的Ni80Cr20层均匀氮化剥离,实现了Ni80Cr20-Al2O3组合体高精度、基底无损伤刻蚀.
关键词:
脉冲激光
,
激光刻蚀
,
复合机体
,
物理机制
