郭建
,
金基用
,
林承武
,
明星
,
周伟峰
,
李斗熙
液晶与显示
doi:10.3969/j.issn.1007-2780.2008.03.014
针对使用半色调掩膜技术的TFT LCD玻璃基板曝光过程中的衍射和干涉现象进行了分析.文中给出了衍射和干涉现象的理论模型,并且对这两种现象在HTM技术中所起的作用进行了解释,尤其针对不同的狭缝宽度和狭缝间距的结构进行了分析.给出了扫描电镜的图片做为进一步的说明.
关键词:
半色调掩膜
,
灰色调掩膜
,
薄膜晶体管液晶显示器
,
曝光
,
衍射
ZHU Xiaolong LIN Leyun Surface Technology Center
,
General Research Institute for Nonferrous Metals
,
Beijing
,
110083
,
ChinaTo whom correspondence should be addressed
材料科学技术（英文）
The corrosion product films of two kinds of B30 tubes(similar to CDA 715)exposed to seawat- er for various periods of time were investigated by SEM,AES and XPS.The results show that the pro- tective corrosion product film is thin,uniform and adherent.FeOOH is found to be present in the film surface,which confirms the hypothesis that iron hydroxide segregates at the surface of the film.The FeOOH promotes Ni enrichment in the corrosion layer by preventing Ni from running off.The corro- sion product film with no protectiveness is of lay- ered structure,loose and bad adherence.The for- mer film is formed through direct oxidation and the latter by precipitation and redeposition from dis- solved species.
关键词:
Cu-Ni alloy
,
null
,
null
