通过正交实验设计工艺参数,利用热丝化学气相沉积法(HFCVD)制备金刚石涂层,采用扫描电镜、洛氏硬度计、X射线衍射仪等对金刚石涂层进行性能表征,同时进行切削试验,从而确定微米层和纳米层最佳的碳源浓度、沉积气压、热丝与基体间距.结果表明:最优微米金刚石涂层沉积工艺参数为碳源浓度2%,沉积气压3 kPa,热丝/基体间距5 mm.最优纳米金刚石涂层沉积工艺参数为碳源浓度5%,沉积气压5 kPa,热丝/基体间距8 mm.
The process parameters were designed by orthogonal experiment.Diamond coatings were synthesized by Hot Filament Chemical Vapor Deposition (HFCVD) and the scanning electron microscopy (SEM), rockwell hardness tester, X-ray diffraction (XRD) were used to test the coating properties and cutting tests to determine the optimum carbon source concentration, deposition pressure and hot wire/substrate spacing for the micro and nano layers.The results show that the optimum micro-diamond coating deposition process parameters are carbon source concentration of 2%, deposition pressure 3 kPa, hot wire/substrate spacing 5 mm.The optimum nano-diamond coating deposition process parameters are Carbon source concentration of 5%, deposition pressure 5 kPa, hot wire/substrate spacing 8 mm.
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