材料期刊网

Ti/ZrN/瓷界面微观结构和力学性能

段珍珍 , 孙大千 , 朱松 , 邱小明

材料工程 doi:10.3969/j.issn.1001-4381.2008.09.011

通过磁控溅射法在纯钛表面溅射了一层ZrN涂层,研究了Ti/ZrN/瓷界面组织和力学性能.结果表明,Ti/瓷界面由富含Ti,Si,O元素的反应层和钛表面氧化层组成.钛表面溅射ZrN涂层后,Ti/瓷界面的连接转变为Ti/ZrN/瓷界面的连接,ZrN涂层能有效地防止钛表面生成过厚的氧化层.Ti/ZrN/瓷结合强度为29.2MPa,与Ti/瓷结合强度23.5MPa相比,提高了24.3%.

关键词: Ti , ZrN , 瓷 , 界面 , 结合强度

基于不同阻挡层材料的铜互连热应力有限元分析

嵇凤丽 , 王颖 , 高松松 , 刘云涛

功能材料与器件学报 doi:10.3969/j.issn.1007-4252.2012.01.010

本文利用ANSYS有限元软件分别对用TaN和ZrN作为扩散阻挡层的Cu/barrier/SiO/Si结构中铜线的热应力分布进行仿真.研究热载荷350℃到20℃不同阻挡层材料单大马士革和双大马士革两种结构铜互连线的热应力.通过仿真结果得到:单大马士革结构中,在阻挡层材料为ZrN时铜线中等效应力(700MPa)比阻挡层材料为TaN时等效应力(800MPa)小；双大马士革结构中,用ZrN作为阻挡层铜线中各个方向的热应力σx、σy和σz分别比TaN作为阻挡层时小100MPa、300MPa和200MPa.本文还研究阻挡层材料分别为ZrN和TaN时,改变阻挡层的厚度对铜线热应力的影响.结果表明,热应力随着阻挡层厚度的增加而增加.各种厚度ZrN作为扩散阻挡层时的应力都比TaN作为扩散阻挡层的应力小,x、y和z方向的应力Sx(zrN)、Sy(zrN)和Sz(zrN)分别减少了50MPa、200MPa和50MPa.

关键词: 铜互连 , 扩散阻挡层 , ZrN , ANSYS , 热应力

First Principles Calculations of the Electronic Structure of ZrN Allotropes

Journal of the Physical Society of Japan

The atomic structures and electronic properties of different ZrN allotropes, including face-centered cubic ZrN (B1 ZrN), hypothetic wurtzite (w) ZrN, and hypothetic two-dimensional (2D) and three-dimensional (3D) layered hexagonal (h) ZrN, are investigated by systematic first-principles calculations. Although the cohesive energy calculation indicates that the B1 ZrN is more stable than the hypothetic w-ZrN and h-ZrN, we suggest that the monolayer h-ZrN may be stable on some substrates. Charge population analysis shows that the polar, covalent bonding character appears between N atoms and Zr atoms for all ZrN allotropes involved in this paper. A Van Hove singularity (VHS) with a high density of states (DOS) locating at 0.2 eV above the Fermi level appears for monolayer h-ZrN, which results from a saddle point of the partially occupied Zr-d(z2) energy bands due to lack of interlayer interaction. Such a VHS observed in the monolayer h-ZrN indicates that this hypothetic monolayer material might be a potential candidate for new superconducting material by electron doping.

关键词: ZrN;monolayer;density functional theory;Van Hove singularity;superconductivity;brillouin-zone integrations;walled carbon nanotubes;augmented-wave;method;charge-density;optical-properties;hafnium nitride;superconductivity;decomposition;temperature;zirconium

阴极电弧离子镀ZrN梯度膜和Zr/ZrN多层膜的腐蚀特性

董超苏 , 代明江 , 邱万奇 , 林松盛 , 胡芳

电镀与涂饰

采用阴极电弧离子镀技术在1Cr13不锈钢表面制备了ZrN梯度层和Zr/ZrN多层膜,并用电化学腐蚀方法和中性盐雾法检测了1Cr13基体、ZrN梯度层和Zr/ZrN多层膜的耐腐蚀性能.结果表明:Zr/ZrN多层膜和ZrN梯度层均能提高1Cr13基体的抗腐蚀能力,而Zr/ZrN多层膜的效果更明显:镀层的内部缺陷(如微孔)和液滴导致薄膜发生孔蚀、隙缝腐蚀和电偶腐蚀;镀层保护的实质是物理屏障作用,细化晶粒、减少膜层中的液滴及针孔等缺陷能显著提高薄膜的抗腐蚀性能.

关键词: 不锈钢 , 氮化锆 , 阴极电弧离子镀 , 腐蚀机理 , 极化曲线 , 中性盐雾试验

直流反应磁控溅射法注积ZrN薄膜

吴大维 , 张志宏 , 罗海林 , 郭怀喜 , 范湘军

材料研究学报

采用直流反应磁控溅射法淀积ZrN薄膜发现在(100)晶向硅片上ZrN薄膜按(111)晶向生长,控制生长工艺可以获得ZrN(111)晶向的外延生长膜.

关键词: ZrN薄膜 , null , null , null

First-principles calculations of the elastic properties of ZrC and ZrN

Journal of Alloys and Compounds

The elastic properties of ZrC and ZrN were calculated employing all-electron full-potential linearized augmented plane-wave (FLAPW) method. The errors between the calculated and experimental lattice constants are within 2%. The elastic properties of polycrystalline ZrC and ZrN were derived. The calculated results indicated the Young's modulus of ZrC is much higher than that of Zr-based single phase glassy alloys. By comparing the elastic properties of ZrC and ZrN, it is suggested that the mechanical properties of Zr-based glass alloys will be improved if ZrN as the disperse phase is introduced to the glassy alloys. (C) 2004 Elsevier B.V. All rights reserved.

关键词: amorphous materials;elasticity;ZrC;ZrN;supercooled liquid region;plane-wave method;ni amorphous-alloys;electronic-structure;cu alloys;glass;particles;films

ZrN及其多层膜的性质和耐腐蚀性能

李成明 , 孙晓军 , 张增毅 , 唐伟忠 , 吕反修

材料热处理学报 doi:10.3969/j.issn.1009-6264.2003.04.013

用磁过滤电弧制备了ZrN和ZrN/TiN多层膜,磁控溅射制备了ZrN薄膜.结果表明,ZrN/TiN多层膜,由于纳米多层化作用,硬度高于ZrN和TiN的26GPa和21GPa,平均值达到34.5GPa.X射线衍射分析表明,ZrN/TiN多层膜由ZrN和TiN组成.过滤电弧制备的ZrN和ZrN/TiN多层膜的结合力为81N和77N,磁控溅射制备的ZrN薄膜的结合力为26N.极化曲线的结果显示,过滤电弧制备的ZrN和ZrN/TiN多层膜的耐腐蚀性显著优于磁控溅射制备的ZrN薄膜,讨论了两种方法制备薄膜性能差异的原因.

关键词: 硬度 , 多层薄膜 , 耐腐蚀性

磁控溅射ZrN薄膜厚度对其色度的影响

孙维连 , 安广 , 孙铂 , 王会强 , 李新领

表面技术 doi:10.3969/j.issn.1001-3660.2012.02.013

采用中频非平衡磁控溅射技术在镜面不锈钢板上制备了ZrN薄膜,通过改变镀膜时间控制ZrN薄膜的厚度.用色差仪测定了不同厚度ZrN薄膜的L*,a*和b*值,绘制出不同厚度ZrN薄膜的L*,a*和b*值的变化曲线图,得出膜层厚度对薄膜色度的影响规律:膜层厚度低于63.7 nm时,随着膜层厚度的增加,L*和a*值无变化,b*值呈线性递增,且颜色逐渐趋于金黄色；膜层厚度高于63.7 nm时,随着膜层厚度的增加,薄膜颜色坐标未有明显变化,颜色为稳定的金黄色.

关键词: 沉积速率 , 膜层厚度 , ZrN薄膜 , 色度

常压烧结制备ZrN（ZrON）-SiAlON复合陶瓷

马北越 , 厉英 , 卢忠鑫 , 于景坤

耐火材料 doi:10.3969/j.issn.1001-1935.2014.03.002

以粉煤灰（≤74μm）、锆英石（≤44μm）和活性炭为原料，采用碳热还原氮化法在1550℃保温6 h合成了ZrN-SiAlON复合材料。以加工成的ZrN-SiAlON复合微粉为主原料，加入聚乙烯醇结合剂，分别在1450、1500和1550℃下埋炭粉常压烧结1 h制备ZrN（ZrON）-SiAlON复合陶瓷，研究了烧成温度对复合陶瓷相组成、显微结构和烧结性能的影响。结果表明：1）控制烧成温度可以制备出不同组成的β-SiAlON基复合陶瓷；在1550℃保温1 h制备的复合陶瓷的主晶相为ZrN、ZrON和β-SiAlON（z＝2，Si4Al2O2N6）；2）从不同温度烧后试样的微观结构中均能观察到ZrN（ZrON）、β-SiAlON和一种铁硅系化合物存在，且ZrN（ZrON）颗粒均匀地分布于β-SiAlON基质中；3）提高烧成温度会使复合陶瓷的收缩率增大，当烧成温度由1450℃升至1550℃时，试样的体积收缩率由19．4％增加至40．3％。

关键词: ZrN(ZrON)-SiAlON , 复合陶瓷 , 常压烧结法 , 粉煤灰 , 锆英石

Effect of high pressure on the electron-phonon interaction and superconductivity in ZrN and HfN

Jetp Letters

Ab initio calculations of the superconducting properties have been performed for zirconium and hafnium nitrides at normal and high pressures. The results for ZrN are in good agreement with the existing data of the tunnel experiments and measurements of the pressure derivative of the critical temperature T-c. It has been shown that the decrease in T-c under compression occurs due primarily to an increase in the phonon frequencies.

关键词: linear-response theory;nbc